광학현미경을 이용한 비접촉식 치수측정시스템의 교정

Abstract

Non-contacting optical microscopes are increasingly used in recent industrial applications of probes for coordinate measuring machines. They have been found more efficient than conventional touch trigger probes with ball tips especially in inspecting small-sized objects. There are two major factors affecting measuring accuracy:(1) geometric relations between coordinate systems, (2) magnification ratios of a microscope. In order to determine the magnification ratios exactly, optical imaging of edge was theoretically analyzed and practically adopted to image processing for edge detection. In addition, this paper proposes a geometric calibration method to obtain exact coordinates of measured points from the relations between the machine coordinate system and the image. In the method, the error according to the squareness between the machine axises was also removed. The method was practically adopted to a real coordinate measuring machine. An ultraprecision measurement of 0.2um uncertainty can be practically achieved.