THE EFFECTS OF CHLORINE CONTENT ON THE PROPERTIES OF TITANIUM CARBONITRIDE THIN-FILM DEPOSITED BY PLASMA ASSISTED CHEMICAL VAPOR-DEPOSITION

Cited 17 time in webofscience Cited 0 time in scopus
  • Hit : 229
  • Download : 0
Wear resistant titanium carbonitride (TiC(x)N(y)) films were deposited onto high speed steel (AISI M2) by plasma assisted chemical vapor deposition using the gaseous mixture of TiCl4, CH4, N2, H-2, and Ar. The effects of deposition conditions on the deposition rate and residual chlorine content were investigated. The influences of the chlorine on the crystallinity, microstructure, and mechanical properties of coatings were also studied. It was found that the residual chlorine content in the films greatly varied with the deposition conditions. Subsequently the crystallinity of the TiC(x)N(y) films deteriorated with the increase in the chlorine content. The microhardness and adhesion strength also decreased with the chlorine content. However, in spite of the low residual chlorine content, TiC(x)N(y) film deposited at high radio-frequency power shows inferior mechanical properties due to the micropore network structure.
Publisher
AMER INST PHYSICS
Issue Date
1991-07
Language
English
Article Type
Article
Keywords

TIN; COATINGS; HARDNESS; STEEL; PARAMETERS; ANISOTROPY

Citation

JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.9, no.4, pp.2174 - 2179

ISSN
0734-2101
URI
http://hdl.handle.net/10203/67442
Appears in Collection
MS-Journal Papers(저널논문)RIMS Journal Papers
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 17 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0