DC Field | Value | Language |
---|---|---|
dc.contributor.author | 장홍영 | ko |
dc.date.accessioned | 2013-02-27T05:03:40Z | - |
dc.date.available | 2013-02-27T05:03:40Z | - |
dc.date.created | 2012-05-16 | - |
dc.date.created | 2012-05-16 | - |
dc.date.issued | 1993 | - |
dc.identifier.citation | 응용물리, v.6, no.5, pp.414 - 420 | - |
dc.identifier.uri | http://hdl.handle.net/10203/66590 | - |
dc.language | Korean | - |
dc.publisher | 한국물리학회 | - |
dc.title | 전자 싸이클로트론 공명 플라즈마 분석 및 박막균일성에 관한 연구 | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 6 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 414 | - |
dc.citation.endingpage | 420 | - |
dc.citation.publicationname | 응용물리 | - |
dc.contributor.localauthor | 장홍영 | - |
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