MECHANICAL DESIGN ISSUES IN LATERALLY-DRIVEN MICROSTRUCTURES

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Publisher
ELSEVIER SCIENCE SA LAUSANNE
Issue Date
1990-04
Language
English
Article Type
Article; Proceedings Paper
Citation

SENSORS AND ACTUATORS A-PHYSICAL, v.23, no.1-3, pp.1060 - 1064

ISSN
0924-4247
DOI
10.1016/0924-4247(90)87089-2
URI
http://hdl.handle.net/10203/66568
Appears in Collection
BiS-Journal Papers(저널논문)
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