DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Young-Ho | ko |
dc.contributor.author | KWAK, BM | ko |
dc.contributor.author | PISANO, AP | ko |
dc.contributor.author | HOWE, RT | ko |
dc.date.accessioned | 2013-02-27T04:53:24Z | - |
dc.date.available | 2013-02-27T04:53:24Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1994-01 | - |
dc.identifier.citation | SENSORS AND ACTUATORS A-PHYSICAL, v.40, no.1, pp.31 - 39 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.uri | http://hdl.handle.net/10203/66542 | - |
dc.description.abstract | Slide film damping occurs when two parallel plates are in relative tangential motion. Viscous energy dissipation in the fluid between the two plates becomes a representative damping mechanism in laterally driven microdevices. In this paper, we investigate the slide film damping both theoretically and experimentally. A new physical model has been proposed for the characterization of slide film damping. Dynamic characteristics of a fluid film have been described in terms of velocity profiles, damping mechanisms, and levels of viscous energy dissipation. Simplified analytical damping formulae have been developed for practical Q estimation. The theoretical Q compares well with the experimental Q. Data reported by previous investigators are also analyzed and compared with the Q value estimated in the present study. It is concluded that our theoretical model offers simple and reasonably good quantitative prediction of Q. Possible sources of error in the theoretical Q prediction are discussed. The effects of fluid-film thickness and microstructure geometry on Q are investigated, so that the results can be used in the damping design for laterally driven microtransducers. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA LAUSANNE | - |
dc.subject | POLYSILICON | - |
dc.title | SLIDE FILM DAMPING IN LATERALLY DRIVEN MICROSTRUCTURES | - |
dc.type | Article | - |
dc.identifier.wosid | A1994MV60700002 | - |
dc.identifier.scopusid | 2-s2.0-0028196236 | - |
dc.type.rims | ART | - |
dc.citation.volume | 40 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 31 | - |
dc.citation.endingpage | 39 | - |
dc.citation.publicationname | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | KWAK, BM | - |
dc.contributor.nonIdAuthor | PISANO, AP | - |
dc.contributor.nonIdAuthor | HOWE, RT | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | POLYSILICON | - |
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