VISCOUS DAMPING MODEL FOR LATERALLY OSCILLATING MICROSTRUCTURES

Cited 143 time in webofscience Cited 0 time in scopus
  • Hit : 209
  • Download : 0
Viscous energy loss in oscillating fluid-film dampers that provide frictional shear for laterally-driven planar microstructures is investigated. It is found that Stokes-type fluid motion models viscous damping more accurately than Couette-type flow field. This paper characterizes the damping property of a fluid layer in terms of viscous energy dissipation, then derives analytic damping formulae for practical Q estimation. Theoretical Q-factors are compared to the experimental values, measured from surface-micromachined polysilicon resonators. Data reported by previous investigators are also analyzed and compared. The experimental results indicate that the Stokes-type damping model presents a more general damping treatment with better Q estimation, although discrepancies of 10 to 20% still remain between the estimated and measured Q. [59]
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
1994-06
Language
English
Article Type
Article
Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.3, no.2, pp.81 - 87

ISSN
1057-7157
URI
http://hdl.handle.net/10203/66541
Appears in Collection
BiS-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 143 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0