DC Field | Value | Language |
---|---|---|
dc.contributor.author | 한봉명 | ko |
dc.contributor.author | 김수용 | ko |
dc.contributor.author | 김경식 | ko |
dc.date.accessioned | 2013-02-25T18:18:05Z | - |
dc.date.available | 2013-02-25T18:18:05Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1992-01 | - |
dc.identifier.citation | 한국표면공학회지, v.25, pp.126 - 132 | - |
dc.identifier.uri | http://hdl.handle.net/10203/64264 | - |
dc.language | Korean | - |
dc.publisher | 한국표면공학회 | - |
dc.title | 광화학 기상성장법에 의한 Si 기관상에서의 TaOx 박막제작에 관한 연구 | - |
dc.title.alternative | Fabrication of TaOx Thin Film on Si-Substrate by Photo-CVD Method | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 25 | - |
dc.citation.beginningpage | 126 | - |
dc.citation.endingpage | 132 | - |
dc.citation.publicationname | 한국표면공학회지 | - |
dc.contributor.localauthor | 김수용 | - |
dc.contributor.nonIdAuthor | 한봉명 | - |
dc.contributor.nonIdAuthor | 김경식 | - |
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