RTA 시스템에서의 온도제어와 웨이퍼상의 온도분포 Simulation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조병진 | ko |
| dc.contributor.author | 김경태 | ko |
| dc.contributor.author | 김충기 | ko |
| dc.date.accessioned | 2013-02-25T16:01:34Z | - |
| dc.date.available | 2013-02-25T16:01:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1988-06 | - |
| dc.identifier.citation | 전자공학회논문지, v.25, no.6, pp.57 - 63 | - |
| dc.identifier.issn | 1016-135X | - |
| dc.identifier.uri | http://hdl.handle.net/10203/63391 | - |
| dc.language | Korean | - |
| dc.publisher | 대한전자공학회 | - |
| dc.title | RTA 시스템에서의 온도제어와 웨이퍼상의 온도분포 Simulation | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 25 | - |
| dc.citation.issue | 6 | - |
| dc.citation.beginningpage | 57 | - |
| dc.citation.endingpage | 63 | - |
| dc.citation.publicationname | 전자공학회논문지 | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | 김경태 | - |
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- EE-Journal Papers(저널논문)
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