Spin-on Source에 의한 실리콘내의 불순물 확산
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김충기 | ko |
| dc.contributor.author | 정태원 | ko |
| dc.date.accessioned | 2013-02-25T15:30:17Z | - |
| dc.date.available | 2013-02-25T15:30:17Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1978-11 | - |
| dc.identifier.citation | 전기학회논문지, v.27, no.6, pp.69 - 75 | - |
| dc.identifier.issn | 1975-8359 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/63233 | - |
| dc.language | Korean | - |
| dc.publisher | 대한전기학회 | - |
| dc.title | Spin-on Source에 의한 실리콘내의 불순물 확산 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 27 | - |
| dc.citation.issue | 6 | - |
| dc.citation.beginningpage | 69 | - |
| dc.citation.endingpage | 75 | - |
| dc.citation.publicationname | 전기학회논문지 | - |
| dc.contributor.nonIdAuthor | 정태원 | - |
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