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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Journal Papers(저널논문)

Spin-on Source에 의한 실리콘내의 불순물 확산

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김충기 / 정태원
Publisher
대한전기학회
Issue Date
1978-11
Language
Korean
Citation

전기학회논문지, v.27, no.6, pp.69 - 75

ISSN
1975-8359
URI
http://hdl.handle.net/10203/63233
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