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A multi-step electrochemical etching process for a three-dimensional micro probe array

Kim, Yoon-Ji; Youn, Se-Chan; Cho, Young-Ho; Park, Ho-Joon; Chang, Byeung-Gyu; Oh, Yong-Soo, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.21, no.1, 2011-01

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