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Results 1-1 of 1 (Search time: 0.002 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Pressurized Cavity Array Design for Wafer-Level Hermetic MEMS Packaging

Kang, Tae Goo; Cho, Young-Ho, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, pp.79 - 82, 2002-07-22

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