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A Batch-fabricated Piezoresistive Cantilever Microaccelerometers with a Symmetrically Bonded Proof-mass Ko, JS; Cho, Young-Ho; Lee, HJ; Park, K, IMEMS 1997, pp.6 - 9, 1997-12 |
Design and Batch-fabrication of Piezoresistive Cantilever Microaccelerometers with Symmetrically Bonded Proof-mass Ko, JS; Cho, Young-Ho; Lee, HJ; Park, K, Proc. International MEMS Workshop (iMEMS '97), pp.6 - 9, 1997 |
Guide-free vertical microprobes with branch springs Kim, JY; Lee, HJ; Cho, Young-Ho, 2010 10th IEEE Conference on Nanotechnology, NANO 2010, pp.915 - 918, 2010-08-17 |
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