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A Batch-fabricated Piezoresistive Cantilever Microaccelerometers with a Symmetrically Bonded Proof-mass Ko, JS; Cho, Young-Ho; Lee, HJ; Park, K, IMEMS 1997, pp.6 - 9, 1997-12 |
A Self-Diagnostic Airbag Accelerometer with Skew-Symmetric Proof-Mass Ko, JS; Kim, Geunho; Cho, Young-Ho; Lee, K; Kwak, Byung Man; Park, K, IEEE: Micro Electro Mechanical Systems, pp.163 - 167, 1995-01-29 |
Design and Batch-fabrication of Piezoresistive Cantilever Microaccelerometers with Symmetrically Bonded Proof-mass Ko, JS; Cho, Young-Ho; Lee, HJ; Park, K, Proc. International MEMS Workshop (iMEMS '97), pp.6 - 9, 1997 |
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