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Methods for the Squeeze Film Damping Analysis of the Perforated Plates Oscillating Perpendicular to Substrate Han, Ki-Ho; Lee, Won Chul; Kim, KW; Cho, Young-Ho; Kim, Moon-Uhn, 5th Inter. Conf. Micro Opto Electro Mechanical Systems (MOEMS'2001), pp.113 - 114, 2001-09 |
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