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High resolution 3D surface imaging using variable structured illumination via Lissajous scanning MEMS mirror module

Seo, Yeong-Hyeon; Jeong, Ki-Hun; Yang, Sung-Pyo; Kim, Hyunwoo; Lee, Wonkyoung; Hwang, Kyungmin, 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS), pp.278 - 281, IEEE MEMS, 2019-01-31

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