Browse "BiS-Conference Papers(학술회의논문)" by Author Kim, ES

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1
Viscous Damping of On-Substrate Torsional Micromirrors

Kim, ES; Cho, Young-Ho, 3th Inter. Conf. Micro Opto Electro Mechanical Systems (MOEMS '99), pp.11 - 16, MOEMS, 1999-08-30

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