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Self-Adjusting Microstructures(SAMS) Judy, MW; Cho, Young-Ho; Howe, RT; Pisano, AP, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp.51 - 56, 1991-01-30 |
Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental study Cho, Young-Ho; Kwak, Byung Man; Pisano, Albert P; Howe, RT, IEEE Micro Electro Mechanical Systems, pp.93 - 98, 1993-02-07 |
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