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Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet

Kim, Y; Youn, S; Han, W; Cho, Young-Ho; Park, H; Chang, B; Oh, Y, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1059 - 1062, 2009-06-21

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