Browse "ME-Journal Papers(저널논문)" by Subject yaw error

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Estimation and correction method for the two-dimensional position errors of a planar XY stage based on motion error measurements

Hwang, J; Park, CH; Lee, CH; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, v.46, no.7-8, pp.801 - 810, 2006-06

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