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Development of a Nanoprecision 3-DOF Vertical Positioning System With a Flexure Hinge Kim, Hyo-Young; Kim, Jung-Jae; Ahn, Da-Hoon; Gweon, Dae-Gab, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.12, no.2, pp.234 - 245, 2013-03 |
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