Browse "ME-Journal Papers(저널논문)" by Subject real-time compensation
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| Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry Oh, Jeong Seok; Bae, Eun Deok; Keem, Taeho; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, v.46, no.14, pp.1748 - 1752, 2006-11 |
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