Browse "ME-Journal Papers(저널논문)" by Subject quadrupole antenna
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| Computational Characterization of a New Inductively Coupled Plasma Source for Application to Narrow Gap Plasma Processes Kim, Dae Woong; You, Shin Jae; Kim, Jung Hyun; Chang, Hongyoung; Oh, Wang-Yuhl, IEEE TRANSACTIONS ON PLASMA SCIENCE, v.43, no.11, pp.3876 - 3882, 2015-11 |
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