Browse "ME-Journal Papers(저널논문)" by Subject integrated microactuator
Showing results 1 to 2 of 2
| Deep X-ray mask with integrated actuator for 3D microfabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.108, no.1-3, pp.121 - 127, 2003-11 |
| Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.111, no.1, pp.37 - 43, 2004 |
Discover
Type
- 12,156 Article
Open Access
- 407 OA Article
Date issued
- 1,580 2020 - 2024
- 3,965 2010 - 2019
- 3,679 2000 - 2009
- 2,269 1990 - 1999
- 600 1980 - 1989