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1	Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes Choi, Minwoo; Kim, Taeyeong; Lee, Bong Jae; Song, Jaeman; Lee, Jungchul, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.33, no.2, pp.124 - 126, 2024-04

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