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A linear air bearing stage with active magnetic preloads for ultraprecise straight motion

Ro, Seung-Kook; Kim, Soohyun; Kwak, Yoon Keun; Park, Chun Hong, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, v.34, pp.186 - 194, 2010-01

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