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Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing

Ryu, Hyun Jun; Kim, Dong Geun; Kang, Sukkyung; Jeong, Ji-hun; Kim, Sanha, CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.70, no.1, pp.273 - 276, 2021-07

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