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Direct reproduction of 3D microstructures using a hybrid approach; by creation of master-patterns and metallic molds for embossing

Bae, Kong Myeong; Ko, Jong Soo; Lim, Tae Woo; Yang, Dong-Yol; Shin, Bo Sung; Lee, Hee Soo; Park, Sang Hu, MICROELECTRONIC ENGINEERING, v.88, no.11, pp.3300 - 3305, 2011-11

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