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Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures

Joo, Woo-Deok; Kim, Seung-Man; Park, Ji-Yong; Lee, Keun-Woo; Lee, Joo-Hyung; Kim, Seung-Chul; KIM, Young-Jin; et al, OPTICS EXPRESS, v.21, no.13, pp.15323 - 15334, 2013-07

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