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Browse "ME-Journal Papers(저널논문)" by Author Wang, IA

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1	Contactless magnetically levitated silicon wafer transport system Park, KH; Lee, SK; Yi, JH; Kim, Soohyun; Kwak, Yoon Keun; Wang, IA, MECHATRONICS, v.6, no.5, pp.591 - 610, 1996-08

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