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UV-nanoimprint lithography using a diamond-like carbon stamp Yang, Dong-Yol; Jeong, JH; Kim, KD; Sim, Youngsuk; Choi, DG; Lee, Eung-sug; Park, SH; et al, PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, v.6151, no.2, pp.6151 - 6192, 2006-03 |
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