Showing results 1 to 4 of 4
A high speed tracking system using adaptive model-following control Lee, JH; Park, KH; Kim, Soohyun; Kwak, Yoon Keun, MECHATRONICS, v.5, no.8, pp.857 - 872, 1995-12 |
Contactless magnetically levitated silicon wafer transport system Park, KH; Lee, SK; Yi, JH; Kim, Soohyun; Kwak, Yoon Keun; Wang, IA, MECHATRONICS, v.6, no.5, pp.591 - 610, 1996-08 |
Robust force control for a magnetically levitated manipulator using flux density measurement Yi, JH; Park, KH; Kim, Soohyun; Kwak, Yoon Keun; Abdelfatah, M; BuschVishniac, I, CONTROL ENGINEERING PRACTICE, v.4, no.7, pp.957 - 965, 1996-07 |
Wafer distribution system for a clean room using a novel magnetic suspension technique Park, KH; Ahn, KY; Kim, Soohyun; Kwak, Yoon Keun, IEEE-ASME TRANSACTIONS ON MECHATRONICS, v.3, no.1, pp.73 - 78, 1998-03 |
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