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Browse "ME-Journal Papers(저널논문)" by Author Nelson, Brent A.

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1	Electrical, thermal, and mechanical characterization of silicon microcantilever heaters Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.; Nelson, Brent A.; Graham, Samuel; King, William P., JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.15, no.6, pp.1644 - 1655, 2006-12

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