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Dry release for surface micromachining with HF vapor-phase etching

Lee, Yong-Il; Park, Kyung-Ho; Lee, Jong Hyun; Lee, Chun Su; Yoo, Hyung Joun; Kim, Chang-Jin; Yoon, Yong-San, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.6, no.3, pp.226 - 233, 1997-09

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