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Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage Khim, Gyungho; Park, Chun-Hong; Lee, Husang; Kim, Seung-Woo, VACUUM, v.81, no.4, pp.466 - 474, 2006-11 |
Prediction and compensation of motion accuracy in a linear motion bearing table Khim, Gyungho; Park, Chun Hong; Shamoto, Eiji; Kim, Seung-Woo, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, v.35, no.3, pp.393 - 399, 2011-07 |
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