Showing results 2 to 3 of 3
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process Kang, Ji-Hoon; Kim, Kwang-Seop; Kim, Kyung-Woong, APPLIED SURFACE SCIENCE, v.257, no.5, pp.1562 - 1572, 2010-12 |
Molecular simulation study on adhesions and deformations for Polymethyl Methacrylate (PMMA) resist in nanoimprint lithography Kwon, Sungjin; Lee, Youngmin; Park, Jaeshin; Im, Seyoung, JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.25, no.9, pp.2311 - 2322, 2011-09 |
Discover