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Robust force control for a magnetically levitated manipulator using flux density measurement Yi, JH; Park, KH; Kim, Soohyun; Kwak, Yoon Keun; Abdelfatah, M; BuschVishniac, I, CONTROL ENGINEERING PRACTICE, v.4, no.7, pp.957 - 965, 1996-07 |
Wafer distribution system for a clean room using a novel magnetic suspension technique Park, KH; Ahn, KY; Kim, Soohyun; Kwak, Yoon Keun, IEEE-ASME TRANSACTIONS ON MECHATRONICS, v.3, no.1, pp.73 - 78, 1998-03 |
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