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Browse "ME-Journal Papers(저널논문)" by Author Matsushita, Kiyohiro

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2	Tuning depth profiles of organosilicate films with ultraviolet curing Kim, Taek-Soo; Tsuji, Naoto; Matsushita, Kiyohiro; Kobayashi, Nobuyoshi; Chumakov, Dmytro; Geisler, Holm; Zschech, Ehrenfried; et al, JOURNAL OF APPLIED PHYSICS, v.104, no.7, 2008-10

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