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Deep X-ray mask with integrated actuator for 3D microfabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.108, no.1-3, pp.121 - 127, 2003-11 |
Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.111, no.1, pp.37 - 43, 2004 |
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