Showing results 1 to 3 of 3
A new spectral imaging ellipsometer for measuring the thickness of patterned thin films Chegal, W; Cho, YJ; Kim, HJ; Cho, HM; Lee, YW; Kim, Soohyun, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.43, pp.6475 - 6476, 2004-09 |
Angle-resolved annular data acquisition method for microellipsometry Ye, SH; Kim, Soohyun; Kwak, Yoon Keun; Cho, HM; Cho, YJ; Chegal, W, OPTICS EXPRESS, v.15, no.26, pp.18056 - 18065, 2007-12 |
Calibration method for rotating-analyser-type spectral imaging ellipsometers Chegal, W; Cho, YJ; Oh, SB; Cho, HM; Lee, YW; Kim, Soohyun, MEASUREMENT SCIENCE & TECHNOLOGY, v.16, pp.716 - 722, 2005-03 |
Discover