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Design and Experiment of PZT 3-DOF Stage

Lee, Hak Jun; Park, Jae Hyun; Kim, Myeong Hyeon; Woo, Siwoong; Jeong, Jae Heon; Gweon, Dae-Gab; Song, Chun Sam; et al, EUSPEN 2014, EUSPEN, 2014-06

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