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Browse "ME-Conference Papers(학술회의논문)" by Author Park, K.Y.

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1
Capacitive Sensing Type SUrface Micromachined Silicon Accelerometer with Stiffness Tuning Capability

Park, K.Y.; Lee, Chong-Won; Jang, H.S.; Oh, Y.S.; Ha, B.J., Int. Workshop on Micro Electro Mechanical Systems(MEMS98), 1998-01

2
Lateral Gyroscope Suspended by Two Gimbals Through High Aspect Ratio ICP Etching

Park, K.Y.; Jeong, H.S.; An, S.; Shin, S.H.; Lee, Chong-Won, International Conference on Solid-State Sensors and Actuators, 1999-06

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