Browse "ME-Conference Papers(학술회의논문)" by Author Park, Juseong
Showing results 1 to 3 of 3
| Plasma-Assisted CMP for Planarization of Adhesive Polymers in 3D Stacked Semiconductor Devices Kang, Sukkyung; Park, Juseong; Jeon, Chan Su; Kim, Kyung Min; Kim, Sanha, International Conference on Planarization/CMP Technology, ICPT 2023, International Conference on Planarization Technology (ICPT), 2023-11-01 |
| Polymer/Cu hybrid CMP process for high-reliability of Cu direct bonding Park, Juseong; Kim, Sanha; Kang Sukkyung; Kim, Kyung Min, Electronic Materials and Nanotechnology for Green Environment (ENGE) 2022, The Korean Institute of Metals and Materials, 2022-11-06 |
| Self-pressure regulating CMP process for hybrid Cu/polymer bonding Kang, Sukkyung; Park, Juseong; Kim, Kyung Min; Kim, Sanha, 3rd Korea-Tribology International Symposium, K-TRIB2023, Korean Tribology Society, 2023-04-05 |
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- 138 Article
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