Browse "ME-Conference Papers(학술회의논문)" by Author M.G.Lee

Showing results 1 to 2 of 2

1
Design of a Dual Servo XYtheta Stage using double H frame

K.H.Kim; M.G.Lee; Gweon, Dae-Gab, ASPE 2002 Anual meeting, pp.199 - 203, 2002

2
Novel linear motor for high precision stage of semiconductor lithography system

M.G.Lee; K.H.Kim; Gweon, Dae-Gab, ASPE 2002 Anual meeting, pp.162 - 165, 2002

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