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Precision 3-D Surface Measurement of Step-structures Using Mode-locked Femtosecond Pulses

Kim, Young Jin; Choi, Minah; Lee, Keun Woo; Jang, Heesuk; Park, Jiyong; Kim, Seung-Woo, International Conference on Photonics and Optical Engineering(ICPOE) 2014, International Conference on Photonics and Optical Engineering(ICPOE) 2014, 2014-10-14

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