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Electrostatic 1D micro scanner with vertical combs for HD resolution display

Cho, Jin Woo; Park, Yong Hwa; Ko, Young Chul; Lee, Byeung Leul; Kang, Seok Jin; Chung, Seok Whan; Choi, Won Kyoung; et al, MOEMS and Miniaturized Systems VI, MOEMS-MEMS, 2007-01-22

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