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Improvement of Temperature Induced Measuring Error in the Positioning Error Measurement of the Ultra Precision Stages Hwang, J.H.; Park, C.H.; Lee, C.H.; Kim, Seung-Woo, International Conference on Leading Edge Manufacturing in 21st Century, pp.541 - 541, 2003-11-03 |
The Analysis and Compensation of Position Error in Scanning Type XY Stage from Motion Error Measurement Hwang, J.H.; Park, C.H.; Lee, C.H.; Kim, Seung-Woo, ASPE 2004 Annual Meeting, pp.0 - 0, 2004-10 |
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