Showing results 1 to 1 of 1
The estimation of 2D position and flatness errors for a planar XY stage from profiles measurement of guide-ways Hwang, J.; Park, C.H.; Kim, Seung-Woo, The 2nd International Conference on Positioning Technology, pp.134 - 138, The 2nd International Conference on Positioning Technology, 2006-12 |
Discover