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Ultra-low power hydrogen sensor by suspended and palladium coated silicon nanowire

Yun, Jeonghoon; Ahn, Jae-Huyk; Choi, Yang-Kyu; Park, Inkyu, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, pp.1079 - 1082, Institute of Electrical and Electronics Engineers Inc., 2017-01

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