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Compensation of out-of-plane error of XY stage based on self-calibration method Yoo, S; Kim, Seung-Woo, 한국정밀공학회 한일심포지엄, pp.301 - 307, 2003-11-27 |
Self-calibration of Coordinate Measuring Machines Yoo, S; Kim, Seung-Woo, Proceeding of the Euspen international topical conference, pp.423 - 426, 2003-05-19 |
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